Publications

ResearcherID : C-5956-2008 (TY, h-index: 23) , AAZ-8749-2021 (RK, h-index: 6)
Google Scholar : TY (h-index: 32), RK (h-index: 7)

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2017

Angstrom-scale flatness using selective nanoscale etching

Takashi Yatsui, Hiroshi Saito, Katsuyuki Nobusada

Angstrom-scale flatness using selective nanoscale etching Journal Article

In: Beilstein Journal of Nanotechnology, 123 , pp. 751, 2017.

Abstract | Links | BibTeX | Tags: First, Nanophotonic fabrication, Near-field etching, Wet etching