High-speed flattening of crystallized glass substrates by dressed-photon-phonon etching

2015年12月1日 yatsuilab achievements, fabrication

Our paper was published in Appl. Phys. A

Wataru Nomura, Takashi Yatsui, Tadashi Kawazoe, Naoya Tate, and Motoichi Ohtsu, “High-speed flattening of crystallized glass substrates by dressed-photon-phonon etching,” Appl. Phys. A, Volume 121, Issue 4, December 2015, pp 1403-1407, DOI: 10.1007/s00339-015-9466-8